长寸量测系列设备

Total Pitch Measurement Series Equipment

上海微电子装备（集团）股份有限公司（SMEE）

Shanghai Microelectronics Equipment (Group) Co., LTD (SMEE)

长寸量测设备，在不同面板厂又称为精密测长机、长宽线宽量测仪或基板变形量测设备。长寸量测设备是监测黄光制程良率的关键设备。本产品采用光学方式，抓取基板上指定位置坐标，并与设计值比对，从而得出长寸（Total Pitch) 位置偏差；本产品同时也可量测短寸（Critical Dimension和Overlay）数据。

Total pitch (TP) measurement equipment, also called as TPCD measurement equipment or plate deformation measurement equipment in different panel factories, is well known as a precise measurement machine. Total pitch measurement equipment is the key equipment to monitor the yield of lithography process. This product adopts the optics to grab the specified position coordinates on the substrate, and compare with the design value, so as to obtain the total pitch position deviation, and critical dimension and overlay data can also be measured.

产品特点：

1. 测量精度高；

2. 产率高，测量点数越多，优势越明显；

3. 调焦传感器测量精度高，工艺适应性强；

4. 软硬件完全自主设计，可根据客户需求进行客制化开发。

Product Features:

1. High measurement accuracy;

2. High throughput. And the more measurement points, the more obvious advantages are the throughput;

3. Focusing sensor is featured with high measuring accuracy and strong process adaptability;

4. The hardware and software are completely independently designed and can be customized according to customer needs.

产品参数：

Product Parameters:

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